Water treatment equipment for silicon single crystal microelectronics industry

Silicon single crystal is a semiconductor material that can be used to make integrated circuits and semiconductor devices. It belongs to non-metallic elements and can be used for power electronic devices such as detector level silicon single crystal and circuit level silicon single crystal, as well as high-power transistors. In the process of microelectronics processing, certain requirements for pure water are needed. If the water quality of industrial pure water does not meet the requirements, it will have a certain impact on the use of the product. The following introduces the water treatment equipment for silicon single crystal microelectronics industry.

This pure water equipment can be divided according to the water quality requirements of the electronic industry, with the water quality resistivity of pure water subdivided into 0.5M Ω· cm, 2M Ω· cm, 10M Ω· cm, 15M Ω· cm, 18M Ω· cm, 18.2M Ω· cm, etc.

The electronic pure water treatment equipment consists of a pre-treatment system, an ion exchange mixed bed (EDI electric desalination system) system, an RO reverse osmosis host system, and other structural components. The pre-treatment system can choose to use processes such as sodium ion softeners, precision filters, multi-media filters, activated carbon filters, etc. according to the local raw water quality.

Water treatment equipment is divided into three main water treatment processes based on the effluent quality: ion exchange resin, reverse osmosis water treatment equipment combined with ion exchange equipment, and reverse osmosis equipment combined with electro deionization (EDI) equipment.

The process flow of silicon single crystal microelectronic ion exchange technology is as follows: raw water inlet → multi-media filter → activated carbon filter → precision filter → intermediate water tank → reverse osmosis equipment → mixed bed (double bed) → ultra pure water tank → ultra pure water pump → post installed security filter → water user.

The advantage of using reverse osmosis technology as a pretreatment process followed by ion exchange technology is that the regeneration cycle of ion equipment is relatively long and consumes much less acid and alkali than simply using ion resin.